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Unlock the Power of the Xallent System
Sheet Resistance: Sheet resistance provides insights into the electrical properties of conducting and semiconducting thin film materials. It is a measure of the resistance across a thin square of a material. Because it is independent of the size of the square, it serves as a good measure of comparing the electrical properties of different materials.
The SAKYIWA XS-10 along with Xallent four point probes directly measure the sheet resistance and resistivity of thin film materials at the micro and nanoscale even making it possible to investigate how grain sizes, boundaries, defects, and material composition impact those measurements. Using that detailed information, researchers and production facilities can quickly optimize material production, reliability, and yield.
The next frontier in semiconductors, thin films, LEDs, MEMS, NEMS, and photonics testing is here—more tests, faster, with higher resolution and at a fraction of the cost, with a much smaller footprint than with conventional equipment. The SAKYIWA XS-10 series enables high-speed extraction of sheet resistance and 4-wire Kelvin resistance of thin films at the micro and nanoscale. Depending on your sample thickness, choose from a portfolio of our four point probe cards to accomplish your testing needs.
“Our Xallent system has given our user base several orders-of-magnitude improvement in measurement throughput and drastically decreased their cost of test. The Xallent system represents a key milestone in semiconductor and thin film materials characterization.”
Ron Olson
Director of Operations | Cornell NanoScale Facility
The SAKYIWA XS-10 is equipped with a computer controlled high precision piezoelectric Z-stage and two manual XY stages to bring the probe tips into the field of view of the camera and make contact with the thin film material or wafer. The SAKYIWA XS-10 is integrated with a camera to allow for direct viewing of the probe tips and the device-under-test (DUT) during testing. The SAKYIWA XS-10 system is powered by a user-friendly software with an intuitive graphical user interface. Driven by computer vision, the software communicates with the source measure unit, piezo-stage, and camera to provide metrology, I/V, and sheet resistance measurements.
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