Xallent – Advanced Nanoscale Testing Solutions

Parametric Probes

Scaling the Future of Heterogeneous Integration

Developing next-generation Heterogeneous Integration (HI) technologies requires tunable design parameters to achieve optimal performance. However, legacy test pads—limited by a standard pitch of ~100 µm—restrict the number of devices that can be integrated into a single test chip. This physical constraint leads to insufficient test coverage, forcing engineers into redundant design and manufacturing cycles.

Xallent’s fine-pitch parametric probes shatter this bottleneck by enabling a 10x reduction in pad pitch. By shrinking the test footprint, we empower researchers to:

  • Maximize Die Density: Dramatically increase the number of testable devices per wafer.

  • Optimize Yield & Reliability: Achieve superior test coverage for high-fidelity performance data.

  • Lower Operational Costs: Reduce the total cost-per-die through more efficient wafer utilization.

  • Accelerate R&D: Shorten learning cycles and expedite time-to-market.

Reduce die size and cost with fine pitch pads

Applications

  • Parametric IV
  • Transmission line measurements (TLM)
  • Sheet resistance
  • 4-wire Kelvin resistance

Specifications

  • Number of tips: 25
  • Arrangement: Inline
  • Probe width: 5 µm ±1 µm
  • Pitch: 10 µm
  • Probe-to-probe leakage current: ~500 pA @ 5 V
  • Current carrying capacity: 100 mA

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