DARIUS Nanoprober is designed to plug into an SEM or used in ambient air to offer unprecedented speed and non-destructive characterization of semiconductor devices and thin film materials. The nanoprober uses piezoelectric stages with 1 nm resolution to offer high precision probing. Proprietary nanoelectromechanical based integrated probes are used for probing. The prober is simple and easy to use.
Darius is a programmable semi-automatic tool for measuring electronic properties of semiconductor devices and thin film materials at the nanoscale in vacuum or ambient air environments. The tool leverages powerful proprietary nanoelectromechanical based integrated probes and software for unprecedented high speed testing of nanomaterials and devices. Oxidation resistant probes are used to offer reliable measurement results.
Darius is a versatile nanoprober that utilizes integrated probes to test and characterize semiconductor devices and thin film materials in a rapid and economical way. The nanoprober offers:
- Improved drift and stability
- Fast navigation for precision probing using piezo stages
- Software automation for fast probe-sample approach and probing
- IV/CV measurements
- Sheet resistance and resistivity mapping measurements
User Friendly Software Interface
|Sample Stage||XYZ travel: 21 mm x 21 mm x 21 mm|
|XYZ resolution: 1 nm (close loop)|
|Sample rotation: 360° (close loop)|
|Sample size: 30 mm x 30 mm|
|Probe Head||Number of probes (application specific, see probes)|
|Probe exchange: Pop-and-Snap©|
|Platinum contact pins|
|Compatible SEMs||Zeiss Ultra and Zeiss Supra
(Dovetail and feedthrough customizable for other SEMs)
|Dimensions||6 in(L) x 3 in(W) x 2.6 in(H)|
|Use in SEM
The Darius Nanoprober is plugged inside an SEM and used to extract the electrical response of a conductive material. An in-situ plasma cleaner is used to remove hydrocarbon contamination from the SEM chamber, sample, and probes before performing nanoprobing measurements.
|Use in Ambient Air
The Darius Nanoprober can also be used in ambient air to measure electronic properties of thin films, 2D materials, flakes and semiconductors. The nanoprober is placed on a vibration isolation table and an optical microscope is used to view the probes in contact with the sample. The Xallent team worked with researchers at Cornell University to use Xallent’s nanoscale 4 point probes to extract the sheet resistance of suspended graphene microvalve.
V. Gund, A. Ruyack, S. Ardanuc and A. Lal, “Graphene one-shot micro-valve: Towards vaporizable electronics,” 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015, pp. 1090-1093.
Probes are manufactured using Xallent’s proprietary Tip-Overhang TM technology (patent pending) where the probe tips are fully suspended metal beams mitigating wear and tear induced from cyclic probing.
- Probe tips are oxidation resistant
- Spring-loaded probe tips allow for probing of 3D structures
- Capable of accessing small areas of interest of less than 1μm2
*All probes displayed are made with platinum tips. We also design and manufacture customer specific probes with a full range of probe spacing, tip material, radii, and loads.
|Probe/Tip Number||Description||Probe Spacing||Quote|
|4 Point Probes||
||400|800|5000 nm||Request More Info|
|25 Point Probes||
||800 nm||Request More Info|
||600 nm||Request More Info|