Simple, repeatable, and accurate resistivity and sheet resistance measurements

Spatial resolution and accuracy of resistivity and sheet resistance measurements are governed by the probe tip spacing. The various nano-to-micro spacings of the four point probes allows for repeatable, accurate, higher spatial resolution and higher measurement throughput sheet resistance and resistivity measurements of semiconductor and thin film materials. These probes are ideal for single spot and multi-spot mapping of resistivity and sheet resistance of thin film materials and semiconductor structures.

SPECIFICATIONS

Item X4-2D-0.4-Pt X4-2D-0.7-Pt X4-2D-5-Pt
Probe Width 400 nm 400 nm
Probe Spacing 400 nm 800 nm
Tip Spacing 700 nm
Tip Length 1.5 um
Spacing Accuracy ±1%
Tip Area
Tip Material Platinum Platinum Platinum
Loads 1 N 1N
Electrical Leakage 1pA @2V 1pA @2V  1pA @2V


 

 

 

 

 

 

 

 

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